nanodevices

Conductive Carbon Nanotubes for Semiconductor Metrology

Victor Vartanian, International SEMATECH Manufacturing Initiative
Paul McClure & Vladimir Mancevski, Xidex Corporation
Joseph J. Kopanski, NIST
Philip D. Rack, The University of Tennessee at Knoxville
Ilona Sitnitsky, Vince LaBella, Matthew D. Bresin, & Kathleen Dunn, SUNY Albany

SPIE Optics and Photonics Conference, August 1-5, 2010, San Diego, CA