NanoBot® System

mala_kada_edited_4The NanoBot® system has an extensive toolbox of specialized end-effectors for manipulation, fabrication and testing of nanomaterials inside a SEM or FIB. This toolbox provides critical capabilities to industrial and university-based nanoscientists as never before.

 Find out why more nanoscientists are now using the exciting new US-built NanoBot system to dramatically increase their R&D productivity, starting with a configuration that meets their immediate needs then adding plug-and-play nanopositioners, multi-gas delivery, and other end effectors as their needs evolve. 

View the complete Product flyer:  pdf  The_NanoBot_-_Transform_your_SEM_or_FIB_into_a_workshop_for_nanodevice_fabrication_and_testing_-_110912.pdf

Here are just some examples of how nanoscientists are putting the NanoBot system to work in their labs:

  • Manipulation of carbon nanotubes and other micro- and nano-scale objects
  • Electrical characterization of micro- and nanostructures, including multi-probe applications.
  • Force sensing, plus gripping with force feedback, for nanomaterial testing, pick-and-place, and other applications
  • Parallel Multi-Precursor Gas Delivery for nanomaterial editing using electron beam induced deposition and etching.
  • Fabrication of custom AFM probes and sharp tungsten probes customized with attached carbon nanotube tips
  • Fabrication of electrical probes with E-beam deposited nanotips for high aspect ratio and high spatial resolution.

Be sure to visit the Application Notes page to keep up to date on specific methods and procedures.  

  • Mounting
  • Control
  • Interface
  • Programmable
  • Platform

Flexible Mounting Options

The NanoBot system can be mounted on the SEM door assembly, leaving the stage free for other tasks. The NanoBot can also be stage mounted if desired. You can easily install and remove the NanoBot system. Xidex will work with you to provide whatever bracketing is required.

Compact Desktop Control Unit

A compact, desk top control unit saves valuable space in your lab. The NanoBot end effectors and XYZ nanopositioners are software addressable via a multi-device network that lets the controller communicate simultaneously with multiple end effectors over a common set of cables. This network architecture, similar to that used in cell phone technology, provides plug-and-play functionality and avoids proliferation of cables and controller boxes. You benefit from the resulting simplicity and flexibility of operation.

Intuitive User Interface

A USB joystick controls and switches between up to 4 nanopositioners, and can control each of the XYZ directions with 7 motion speeds and 3 modes of operation (Multi-Step, Single-Step and Fine-Motion). The graphical user interface provides the same control functions, but also generates audible queues on system status, allowing you to focus your full attention on the real time SEM image. Speeds and the modes for XY and Z axes are controlled separately, which is especially well-suited for fine control in an SEM instrument where depth of focus is an issue. The joystick can also start and stop built-in or user programmed software applications with a pull of the trigger.

User Programmable Software

LabVIEW based software makes the NanoBot system extraordinarily easy to use, and gives you the user-programmability you have been looking for. A library of LabVIEW based applications, called Actions™, is provided with the system and additional applications come with various end effectors that enable multi-precursor gas delivery force sensing and gripping with force feedback. In addition to the Actions library, you can also use the Application Toolbox provided with the system to create your own applications, transforming existing laboratory procedures into customized Actions that control the NanoBot system and its end effectors. The software provided with the system can call out such user-made Actions and integrate them with the NanoBot system’s built-in functions.

Nanopositioner Platform

In Multi-Step mode the NanoBot nanopositioning stages can travel up to 15 mm in X, Y, and Z at speeds that are adjustable up to 1 mm/sec. Single-Step mode is adjustable from 100 nm to 2 μm. Fine Motion mode provides a continuous range up to ± 3.5 μm in X, Y or Z with respect to a parked position anywhere in the system’s overall range with <1 nm resolution. Simultaneous XYZ travel is enabled in all operating modes. The product package includes the nanomanipulator, vacuum feedthrough, mounting bracket adjustable to fit your SEM or FIB, low-noise coaxial/triaxial electrical cables, a compact desk top module that includes the controller, power supply and digital acquisition (DAQ) board, a joystick, and the LabVIEW user interface already installed on a laptop computer running Windows OS.

The NanoBot system’s robust, common-platform, nanopositioner design supports basic probing and manipulation applications plus a variety of advanced end effectors, allowing you to extend functionality without proliferating nanopositioning hardware. The orthogonal XYZ stages use stacked piezos with inertial drive to provide the same ranges and speeds of motion in all three directions. Stiffness on the order of 106 N/m enables the NanoBot system to support end effectors which may require high stiffness and load capacity. The NanoBot platform supports dynamic loads up to 2 N and static loads > 2 N.